High-Precission Inline Thin Film Thickness Measurements
The innovative IMS5200-TH white light interferometer from Micro-Epsilon, with sub-nanometer resolution, opens up new possibilities for high-speed inline measurements of transparent materials as thin as 1 µm.
Nanometer Accuracy at High Speed
The industrial white light interferometer is the most accurate optical measuring system offered by Micro-Epsilon, a leading provider of advanced measurement solutions. Their new IMS5200-TH white light interferometer introduces advanced capabilities for fast and accurate thickness measurements.
Equipped with intelligent signal evaluation, the controller ensures precise, distance-independent measurement of transparent single layers and multilayer coatings from 100 µm down to just 1 µm—even on moving objects. With a high measuring rate of up to 24 kHz, the IMS5200 series is ideally suited for demanding industrial applications—delivering nanometer accuracy even for ultra-thin layers.
Key Features of IMS5200-TH
- Measuring rate up to 24 kHz for fast, stable measurements
- Easy integration thanks to a large operating range
- Precise coating thickness measurement from 1 to 100 µm
- Multi-peak capability: measurement of up to 5 layers
- Industry-optimized sensor with robust metal housing
- Suitable for use in vacuum environments
- Simple configuration via web interface
Accurate Thickness Across Multiple Layers
The sensor and controller are factory-matched and calibrated, enabling nanometer-precision measurement of air gaps and layer thicknesses.
The multi-peak (MP) controller variant enables simultaneous evaluation of multiple signal peaks, making it ideal for measuring the thickness of transparent multi-layer materials and laminated glass. It delivers highly stable thickness values—independent of layer position.
Built for Industrial Environments
Designed for easy integration into production environments, the robust sensor and metal-housed controller offer high durability. With its compact design and large operating range, the IMS5200-TH is easy to install—even in tight spaces—and ensures stable measurements, even in vibrating conditions.
The controller mounts on a DIN rail inside a control cabinet, with cable lengths up to 10 m allowing flexible sensor placement. Integrated interfaces such as Ethernet, EtherCAT and RS422 as well as encoder connections, analog outputs, synchronization inputs and digital I/Os, support the connection to modern control systems and production programs. Setup and parameterization are done via a web interface—no software installation needed.
Multiple Models for Diverse Applications
Multiple models IMS5200-TH are available for demanding inline measurements of thin transparent layers—such as film and glass coatings—across various industries, including cleanroom environments and vacuum applications.
Typical fields of application include:
- Semiconductor technology
- Metal and steel industry
- Production monitoring
- Packaging industry
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