Industrial interferometer

Micro Epsilon’s industrial white light interferometer allows you to measure minimum distances and thicknesses in demanding industrial applications without contact.

Measure distance and thickness without contact

Micro-Epsilon’s industrial white light interferometer allows you to measure minimum distances and thicknesses in demanding industrial applications without contact.

Ensure the stability of measurements with a resolution below the nanometer. This interferometer expands the range of applications with confocal sensors.

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Use it in demanding industrial applications

The industrial white light interferometer is Micro Epsilon ‘s most accurate optical measuring system. Micro Epsilon is a leading provider of advanced measurement solutions in the field of automation, especially where you need extremely accurate measurements or analyzes.

An interferometer can be used in industry to measure distance and thickness in the sub-nanometer range, even <30 pm. In addition to its exceptional accuracy, you can also rely on the stability of the performed measurements.

Exploit robustness and flexibility

The white light industrial interferometer consists of a robust sensor, a highly flexible optical cable and a controller in an aluminum housing that can be mounted on DIN brackets.

Because the controller can actively compensate for changes in ambient temperature and is extremely temperature stable, it can also be used in temperature-demanding conditions.

The cable length up to 20 m enables the spatial separation of the sensor and the controller.

Industrial interferometer for accurate non-contact measurements

Install it with ease

Industrial interferometer for accurate non-contact measurements

Micro-Epsilon solution gives you a huge variety of settings that you can easily make via the web interface.

For optimal integration of the interferometer into devices and systems, a wide range of possible interfaces is available:

  • digital interfaces (Ethernet / EtherCAT / RS422),
  • encoder connections,
  • analog outputs,
  • synchronization outputs and digital I / O.

Choose the model you need

There are 3 models of interferometers available for different applications, two for distance measurement and one for thickness measurement.

In the field of industrial automation, you can use a white light interferometer in applications where you need the highest level of measurement accuracy in production. It will come in handy e.g. in the production of semiconductors,  thin films / films, screens, LEDs and in the glass industry.

Industrial interferometer for accurate non-contact measurements

Use it in various industrial or automation applications

Industrial interferometer for accurate non-contact measurements

Unlike conventional laser interferometers, the IMS5x00 measures absolute distance. In this way, they also allow you to make very accurate measurements of stepped profiles.

There are three IMS5x00 models available for different applications:

The IMS5400-DS is designed for the most accurate distance measurements in the industry. It offers you the possibility of measuring at a great distance from the target and capturing a large measuring range.

The IMS5600-DS is designed for distance measurements with nanometer accuracy, especially in the production of electronics and semiconductors. It is ideal if you measure glass, metals and reflective surfaces.

The IMS5400-TH is designed for nanometer thickness measurements in industrial processes. It allows you to have stable thickness measurements in the range of 35-2100 µm, regardless of the distance from the target.

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Industrial interferometer for accurate non-contact measurements

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